Visualization of a microelectromechanical system MEMS device, Materials Science, Microfabrication
Keywords
visualisation,
system,
mem,
device,
material,
science,
engineering,
technology,
diagnostic,
package,
silicon,
integration,
application,
challenge,
prototype,
actuator,
dynamic,
energy,
improvement,
assembly,
fabrication,
pathway,
synthesis,
interface,
performance,
standard